Microelectronics manufacturability, yield, and reliability : 20-21 October 1994, Austin, Texas

Author(s)

• Vasquez, Barbara
• Kawasaki, Hisao
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Microelectronics manufacturability, yield, and reliability : 20-21 October 1994, Austin, Texas

Barbara Vasquez, Hisao Kawasaki, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2334）

SPIE, c1994

Note

Includes bibliographical references and index

• NCID: BA29176079
• ISBN:
  • 0819416673
• LCCN: 94067260
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix, 348 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Reliability -- Congresses
• Parent Bibliography ID:
  • BA0022700X