Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas

Author(s)

• Chen, Fusen E.
• Murarka, S. P.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas

Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2335）

SPIE, c1994

• pbk.

Note

Includes bibliographical references and author index

• NCID: BA29176512
• ISBN:
  • 0819416681
• LCCN: 94067261
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix, 292 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Plasma etching -- Congresses
  • LCSH : Metallizing -- Congresses
  • LCSH : Dielectric films -- Congresses
• Parent Bibliography ID:
  • BA0022700X