Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California

Author(s)

• Society of Photo-optical Instrumentation Engineers
• Allen, Rober D.

Bibliographic Information

Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California

chair/editor Robert D. Allen ; sponsored and published by SPIE--the International Society for Optical Engineer

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2438）

SPIE, c1995

• SET
• pt. 1
• pt. 2

Note

Includes bibliographical references and index

Details

• NCID: BA29309547
• ISBN:
  • 0819417866
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: v.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X