Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California

著者

• Kunz, Roderick R,
• Society of Photo-optical Instrumentation Engineers

書誌事項

Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California

Roderick R. Kunz chiar/editor ; sponsored and published by SPIE--the International Society for Optical Engineeri

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2724）

SPIE, c1996

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA29310400
• ISBN:
  • 0819421006
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: xi, 774 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X