OSA proceedings on extreme ultraviolet lithography

Author(s)

• Zernike, Frits
• Attwood, David T.
• OSA Topical Meeting

Bibliographic Information

OSA proceedings on extreme ultraviolet lithography

edited byFrits Zernike and David T. Attwood ; sponsored by Optical Society of America

The Society, c1995

• v. 23

Note

v. 23: Proceedings of the Topical Meeting, September 19-21, 1994, Monterey, California

Includes bibliographical references and index

Details

• NCID: BA29382376
• ISBN:
  • 1557523630
• LCCN: 94065375
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington, DC
• Pages/Volumes: xi, 283 p.
• Size: 24 cm
• Classification:
  • LCC : TS517.2
• Subject Headings:
  • LCSH : Optical coatings -- Congresses
  • LCSH : Photolithography -- Congresses
  • LCSH : Ultraviolet radiation -- Industrial applications -- Congresses
  • LCSH : Interferometry -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses