OSA proceedings on extreme ultraviolet lithography

著者

• Zernike, Frits
• Attwood, David T.
• OSA Topical Meeting

書誌事項

OSA proceedings on extreme ultraviolet lithography

edited byFrits Zernike and David T. Attwood ; sponsored by Optical Society of America

The Society, c1995

• v. 23

注記

v. 23: Proceedings of the Topical Meeting, September 19-21, 1994, Monterey, California

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA29382376
• ISBN:
  • 1557523630
• LCCN: 94065375
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Washington, DC
• ページ数/冊数: xi, 283 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TS517.2
• 件名:
  • LCSH : Optical coatings -- Congresses
  • LCSH : Photolithography -- Congresses
  • LCSH : Ultraviolet radiation -- Industrial applications -- Congresses
  • LCSH : Interferometry -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses