Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG

Author(s)

• Karthe, Wolfgang
• Commission of the European Communities. Directorate-General for Science, Research, and Development
• European Optical Society
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG

Wolfgang Karthe, chair/editor ; sponsored by the Commission of European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2213）（Proceedings EurOpto series）

SPIE, c1994

• :pbk.

Note

Includes bibliographical references and author index

• NCID: BA29484809
• ISBN:
  • 0819415170
• LCCN: 94065766
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix, 334 p.
• Size: 28 cm
• Classification:
  • LCC : T174.7
• Subject Headings:
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Integrated optics -- Congresses
  • LCSH : Optical instruments -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X
  • BA22033277