Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG
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Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 2213)(Proceedings EurOpto series)
SPIE, c1994
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Includes bibliographical references and author index