Bibliographic Information

Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG

Wolfgang Karthe, chair/editor ; sponsored by the Commission of European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE--the International Society for Optical Engineering

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 2213)(Proceedings EurOpto series)

SPIE, c1994

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Includes bibliographical references and author index

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