Optical scattering in the optics, semiconductor, and computer disk industries : proceedings, 13-14 July 1995, San Diego, California
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Optical scattering in the optics, semiconductor, and computer disk industries : proceedings, 13-14 July 1995, San Diego, California
（Proceedings / SPIE -- the International Society for Optical Engineering, v.2549）
SPIE--the International Society for optical Engineering, c1995
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Includes bibliographical references and author index