Microchip fabrication : a practical guide to semiconductor processing
著者
書誌事項
Microchip fabrication : a practical guide to semiconductor processing
McGraw-Hill, c1996
3rd ed
- : hardcover
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注記
Includes index
内容説明・目次
内容説明
This introduction to semiconductor fabrication covers everything from basic materials and process chemicals to chip packaging, without using high powered maths or complex engineering theory. It includes new material on memory circuits, packaging techniques and semiconductor devices.
目次
- The semiconductor industry
- semiconductor materials and process chemicals
- crystal growth and materials preparation
- contamination control
- wafer fabrication
- process yields
- oxidation
- photolithography
- advanced processes
- doping
- metalization
- manufacturing technology
- semiconductor devices
- integrated circuit types
- packaging.
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