Microchip fabrication : a practical guide to semiconductor processing

Author(s)
    • Van Zant, Peter
Bibliographic Information

Microchip fabrication : a practical guide to semiconductor processing

Peter Van Zant

McGraw-Hill, c1996

3rd ed

  • : hardcover

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Note

Includes index

Description and Table of Contents

Description

This introduction to semiconductor fabrication covers everything from basic materials and process chemicals to chip packaging, without using high powered maths or complex engineering theory. It includes new material on memory circuits, packaging techniques and semiconductor devices.

Table of Contents

  • The semiconductor industry
  • semiconductor materials and process chemicals
  • crystal growth and materials preparation
  • contamination control
  • wafer fabrication
  • process yields
  • oxidation
  • photolithography
  • advanced processes
  • doping
  • metalization
  • manufacturing technology
  • semiconductor devices
  • integrated circuit types
  • packaging.

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