Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics
Author(s)
Bibliographic Information
Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics
（Materials science and process technology series）
Noyes Publications, c1995
Available at 1 libraries
Note
Includes bibliographical references (p. 306-307) and index
Description and Table of Contents
Description
This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.
Table of Contents
IntroductionIndustrial Hygiene MonitoringIndustrial Hygiene Monitoring: Physical AgentsVentilationPersonal Protective Equipment (PPE)Indoor Air Quality (IAQ)ErgonomicsIndustrial Hygiene RecordkeepingPlan ReviewAppendix A: Silicon Ingot and Wafer ManufacturingAppendix B: Silicon Device Manufacturing IntroductionAppendix C: III-V (GaAs)Appendix D: III-V Device: Microwave ICAppendix E: Ion Implanter Maintenance Safety ConsiderationsAppendix F: BibliographyGlossary and AcronymsIndex
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