Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics

著者

    • Williams, Michael E.
    • Baldwin, David G.
    • Manz, Paul C.

書誌事項

Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics

by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz

（Materials science and process technology series）

Noyes Publications, c1995

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注記

Includes bibliographical references (p. 306-307) and index

内容説明・目次

内容説明

This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.

目次

IntroductionIndustrial Hygiene MonitoringIndustrial Hygiene Monitoring: Physical AgentsVentilationPersonal Protective Equipment (PPE)Indoor Air Quality (IAQ)ErgonomicsIndustrial Hygiene RecordkeepingPlan ReviewAppendix A: Silicon Ingot and Wafer ManufacturingAppendix B: Silicon Device Manufacturing IntroductionAppendix C: III-V (GaAs)Appendix D: III-V Device: Microwave ICAppendix E: Ion Implanter Maintenance Safety ConsiderationsAppendix F: BibliographyGlossary and AcronymsIndex

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