Code compliance for advanced technology facilities : a comprehensive guide for semiconductor and other hazardous occupancies

著者

• Acorn, William R.

書誌事項

Code compliance for advanced technology facilities : a comprehensive guide for semiconductor and other hazardous occupancies

by William R. Acorn

（Materials science and process technology series）

Noyes Publications, c1993

注記

Includes index

詳細情報

• NII書誌ID(NCID): BA29752872
• ISBN:
  • 0815513380
• LCCN: 93028549
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Westwood, N. J.
• ページ数/冊数: xv, 357 p.
• 大きさ: 25 cm
• 件名:
  • LCSH : Hazardous substances -- Safety measures -- Handbooks, manuals, etc
  • LCSH : Hazardous substances -- Law and legislation -- United States -- Handbooks, manuals, etc
• 親書誌ID:
  • BA04523161