Micromechanics and MEMS : classic and seminal papers to 1990

Author(s)

• Trimmer, William S.
• Institute of Electrical and Electronics Engineers

Bibliographic Information

Micromechanics and MEMS : classic and seminal papers to 1990

edited by William S. Trimmer

IEEE Press, c1997

Note

"A selected reprint volume."

Includes bibliographical references and index

Details

• NCID: BA29757377
• ISBN:
  • 0780310853
• LCCN: 96034081
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xv, 701 p.
• Size: 29 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381
• Subject Headings:
  • LCSH : Microelectronics
  • LCSH : Electromechanical devices
  • LCSH : Micromechanics
  • LCSH : Actuators