IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 96 proceedings, November 11-14, 1996, Cambridge, Massachusetts

Author(s)

• IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
• Institute of Electrical and Electronics Engineers
• Semiconductor Equipment and Materials International

Bibliographic Information

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 96 proceedings, November 11-14, 1996, Cambridge, Massachusetts

IEEE Service Center, c1996

• : soft.
• : case.

Other Title

96CB35953 96CH35953

Note

Includes bibliographical references

"IEEE catalog number 96CH35953"

"Theme - Innovation approaches to growth in the semiconductor industry"

Description and Table of Contents

Description

This text focuses on the methods used to achieve successful results in manufacturing advanced semiconductors. It covers such topics as: computer integrated manufacturing (CIM); maximizing equipment productivity; inline inspection for defect reduction; and manufacturing cost reduction techniques.

by "Nielsen BookData"

Details

• NCID: BA29910565
• ISBN:
  • 0780333713
  • 0780333721
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway, NJ
• Pages/Volumes: vi, 479 p.
• Size: 28 cm
• Classification:
  • LCC : TK7836
  • DC20 : 621.381/52
• Subject Headings:
  • LCSH : Electronic industries -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses
  • LCSH : Computer integrated manufacturing systems -- Congresses