Proceedings of the eleventh International Symposium on Plasma Processing

著者

• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Mathad, G. S.
• Meyyappan, M.

書誌事項

Proceedings of the eleventh International Symposium on Plasma Processing

editors, G.S. Mathad, M. Meyyappan ; [sponsored by] Dielectric Science and Technology and electronics Divisions

（Proceedings / [Electrochemical Society], v. 96-12）

the Electrochemical Society, Inc., c1996

タイトル別名

Plasma processing XI

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA29982351
• ISBN:
  • 1566771641
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xi, 720 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290