Proceedings of the eleventh International Symposium on Plasma Processing

Author(s)

• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division
• Mathad, G. S.
• Meyyappan, M.

Bibliographic Information

Proceedings of the eleventh International Symposium on Plasma Processing

editors, G.S. Mathad, M. Meyyappan ; [sponsored by] Dielectric Science and Technology and electronics Divisions

（Proceedings / [Electrochemical Society], v. 96-12）

the Electrochemical Society, Inc., c1996

Other Title

Plasma processing XI

Note

Includes bibliographical references and index

Details

• NCID: BA29982351
• ISBN:
  • 1566771641
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: xi, 720 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290