Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas

Author(s)

• Markus, Karen W.
• Semiconductor Equipment and Materials International
• National Institute of Standards and Technology (U.S.)
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas

Karen W. Markus, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society of Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2639）

SPIE, c1995

Note

Includes bibliographical references and index

Details

• NCID: BA30112492
• ISBN:
  • 0819420050
• LCCN: 95070374
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 336 p.
• Size: 28 cm
• Classification:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X