Microsystem technology and microrobotics
Author(s)
Bibliographic Information
Microsystem technology and microrobotics
Springer, c1997
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Note
Includes bibliographical references (p. [366]-401) and index
Description and Table of Contents
Description
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Table of Contents
1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.
by "Nielsen BookData"