Microsystem technology and microrobotics

Author(s)

• Fatikow, S. (Sergej)
• Rembold, Ulrich

Bibliographic Information

Microsystem technology and microrobotics

S. Fatikow, U. Rembold

Springer, c1997

Note

Includes bibliographical references (p. [366]-401) and index

Details

• NCID: BA30313111
• ISBN:
  • 3540606580
• LCCN: 96053992
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin ; New York
• Pages/Volumes: xii, 408 p.
• Size: 24 cm
• Classification:
  • LCC : TJ163
  • DC21 : 621
• Subject Headings:
  • LCSH : Electromechanical devices -- Design and construction
  • LCSH : Microfabrication
  • LCSH : Robotics