Chemical mechanical planarization of microelectronic materials

Author(s)

• Steigerwald, Joseph M.
• Murarka, S. P.
• Gutmann, Ronald J.

Bibliographic Information

Chemical mechanical planarization of microelectronic materials

[by] Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann

J.Wiley, c1997

Note

Includes bibliographical references and index

Details

• NCID: BA30326623
• ISBN:
  • 0471138274
• LCCN: 96006198
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xiii, 324 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871
  • DC20 : 621.3815/2
• Subject Headings:
  • LCSH : Microelectronics -- Materials
  • LCSH : Grinding and polishing