Ion implantation technology-96 : proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996
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Ion implantation technology-96 : proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996
IEEE Service Center, c1997
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1996 11th International Conference on Ion Implantation Technology Proceedings
96TH8182
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IEEE Catalog number: 96TH8182