CVD of compound semiconductors : precursor synthesis, development and applications
Author(s)
Bibliographic Information
CVD of compound semiconductors : precursor synthesis, development and applications
VCH, c1997
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Note
Includes bibliographicai references and index
Description and Table of Contents
Description
Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This text details the deposition methods available for different materials aiming to make the chemistry of deposition accessible to the materials scientist.
Table of Contents
- Basic electronics
- introduction to vapour-phase epitaxy
- MOCVD
- ALE
- CBE
- precursor chemistry
- general classes
- synthesis purification
- effects of trace impurities on layer properties
- deposition of III-V semiconductors
- MOCVD
- ALE
- CBE
- deposition of II-VI semiconductors
- MOCVD
- future prospects.
by "Nielsen BookData"
