CVD of compound semiconductors : precursor synthesis, development and applications
著者
書誌事項
CVD of compound semiconductors : precursor synthesis, development and applications
VCH, c1997
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注記
Includes bibliographicai references and index
内容説明・目次
内容説明
Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This text details the deposition methods available for different materials aiming to make the chemistry of deposition accessible to the materials scientist.
目次
- Basic electronics
- introduction to vapour-phase epitaxy
- MOCVD
- ALE
- CBE
- precursor chemistry
- general classes
- synthesis purification
- effects of trace impurities on layer properties
- deposition of III-V semiconductors
- MOCVD
- ALE
- CBE
- deposition of II-VI semiconductors
- MOCVD
- future prospects.
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