VLSI planarization : methods, models, implementation

著者

• Feĭnberg, V. Z. (Valeriĭ Zalmanovich)
• Levin, A.
• Rabinovich, E.

書誌事項

VLSI planarization : methods, models, implementation

by V. Feinberg, A. Levin, and E. Rabinovich

（Mathematics and its applications, v. 399）

Kluwer Academic, c1997

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA31161868
• ISBN:
  • 079234510X
• LCCN: 97008145
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Dordrecht ; Boston
• ページ数/冊数: vi, 184 p.
• 大きさ: 25 cm
• 分類:
  • LCC : TK7874.75
  • DC21 : 621.39/5
• 件名:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction
  • LCSH : Integrated circuits -- Very large scale integration -- Mathematical models
• 親書誌ID:
  • BA00044495