VLSI planarization : methods, models, implementation

Author(s)

• Feĭnberg, V. Z. (Valeriĭ Zalmanovich)
• Levin, A.
• Rabinovich, E.

Bibliographic Information

VLSI planarization : methods, models, implementation

by V. Feinberg, A. Levin, and E. Rabinovich

（Mathematics and its applications, v. 399）

Kluwer Academic, c1997

Note

Includes bibliographical references and index

Details

• NCID: BA31161868
• ISBN:
  • 079234510X
• LCCN: 97008145
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Dordrecht ; Boston
• Pages/Volumes: vi, 184 p.
• Size: 25 cm
• Classification:
  • LCC : TK7874.75
  • DC21 : 621.39/5
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction
  • LCSH : Integrated circuits -- Very large scale integration -- Mathematical models
• Parent Bibliography ID:
  • BA00044495