Ion and neutral spectroscopy

Author(s)

• Briggs, D.
• Seah, M. P.

Bibliographic Information

Ion and neutral spectroscopy

edited by D. Briggs and M.P. Seah

（Practical surface analysis, v. 2）

Wiley , Salle+Sauerlander, 1996. c1992

2nd ed

• : pbk

Note

Includes bibliographical references and index

First published as a paperback in March 1996

Description and Table of Contents

Description

This volume reflects the rapid evolution of surface analysis techniques involving ion and neural spectroscopies. Sputtering techniques are comprehensively discussed in chapters covering instrumentation, theory, quantification, dynamic and static SIMS and various applications.

Table of Contents

• A perspective on the analysis of surfaces and interfaces
• instrumentation for SIMS
• basic aspects of sputter depth profiling
• quantitative analysis using sputtering techniques - secondary ion and sputtered neutral mass spectrometry
• dynamic SIMS and its applications in microelectronics
• static SIMS - surface analysis of organic materials
• sputtered neutral mass spectrometry (SNMS)
• ion scattering spectroscopic techniques
• medium energy ion scattering.

by "Nielsen BookData"

Details

• NCID: BA31324474
• ISBN:
  • 0471964980
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Chichester, West Sussex, England ; New York,Aarau ; Frankfurt am Main
• Pages/Volumes: xvi, 738 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA11114413