Microlithography
Author(s)
Bibliographic Information
Microlithography
（IEE materials & devices series, 12 . Handbook of microlithography,
SPIE Optical Engineering Press , Institution of Electrical Engineers, c1997
- : us
- : uk
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Note
"SPIE press monograph PM39"
Includes bibliographical references and index
Description and Table of Contents
- Volume
-
: us ISBN 9780819423788
Description
The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
- Volume
-
: uk ISBN 9780852969069
Description
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Table of Contents
- Optical lithography
- electron beam lithography
- X-ray lithography
- deep UV resist technology
- photomask fabrication procedures and limitations
- metrology methods in photolithography
- optical lithography modelling
- issues in nanolithography for quantum effect device manufacture.
by "Nielsen BookData"