Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.

Author(s)

• Reif, Rafael
• Symposium on Environmental, Safety, and Health (ESH) Issues in IC Production

Bibliographic Information

Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.

editors, Rafael Reif ... [et al.]

（Materials Research Society symposium proceedings, v. 447）

Materials Research Society, c1997

Note

Includes bibliographical references and index

Details

• NCID: BA3192909X
• ISBN:
  • 1558993517
• LCCN: 97011466
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburgh, Pa.
• Pages/Volumes: ix, 154 p.
• Size: 24 cm
• Classification:
  • LCC : TK7836
  • DC21 : 363.11/9621384134
• Subject Headings:
  • LCSH : Semiconductor industry -- Safety measures -- Congresses
  • LCSH : Integrated circuits industry -- Safety measures -- Congresses
  • LCSH : Manufacturing processes -- Safety measures -- Congresses
  • LCSH : Green technology -- Congresses
• Parent Bibliography ID:
  • BA00013775