Proceedings of the First International Symposium on Chemical Mechanical Planarization

Author(s)

• International Symposium on Chemical Mechanical Planarization
• Ali, Iqbal
• Raghavan, S. (Srini)
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

Bibliographic Information

Proceedings of the First International Symposium on Chemical Mechanical Planarization

editors, I. Ali, S. Raghavan

（Proceedings / [Electrochemical Society], v. 96-22）

Electrochemical Society, c1997

Note

"Electronics and Delectric Science and Technology Divisions"

Includes bibliographical references and indexes

Details

• NCID: BA32334994
• ISBN:
  • 1566771722
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: ix, 275 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290