Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems
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Bibliographic Information
Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems
（Proceedings / [Electrochemical Society], v. 97-5）
Electrochemical Society, c1997
- Other Title
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Microstructures and microfabricated systems III
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"Sensor, Dielectric Science and Technology, and Electronics Divisions"
"Held at the 191st Meeting of the Electrochemical Society, May, 4-9th, 1997, in Montreal, Canada"--Pref
Includes bibliographical references and indexes