Micromachining and microfabrication
Author(s)
Bibliographic Information
Micromachining and microfabrication
（IEE materials & devices series, 12B . Handbook of microlithography,
SPIE Optical Engineering Press , Institution of Electrical Engineers, c1997
- : us
- : uk
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Note
"SPIE press monograph PM40"
Includes bibliographical references and index
Description and Table of Contents
- Volume
-
: us ISBN 9780819423795
Table of Contents
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
- Volume
-
: uk ISBN 9780852969113
Description
This volume concentrates on the process technology and device applications associated with micomachining and microfabrication. The handbook is intended primarily for industrial laboratories, universities and manufacturing facilities.
Table of Contents
- Micromachining and trends for the 21st century
- wet chemical etching of silicon and SiO2
- issues in dry etching
- plating techniques
- high aspect ratio processing
- sensors and actuators
- micro-optical devices
- biomedical devices
- smart materials, MEMs and electronics integration.
by "Nielsen BookData"