IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 97 proceedings, September 10-12, 1997, Cambridge, Massachusetts
著者
書誌事項
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 97 proceedings, September 10-12, 1997, Cambridge, Massachusetts
IEEE Service Center, c1997
- : soft.
- : case.
- タイトル別名
-
97CH36089 97CB36089
大学図書館所蔵 全2件
注記
Includes bibliographical references
"IEEE catalog number 97CH36089"
"Theme - the quest for semiconductor manufacturing excellence: leading the charge into the 21st Century"