Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
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Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3008)
SPIE, c1997
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Includes bibliographical references and index