{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BA33584002.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BA33584002#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BA33584002.json"},"dc:title":[{"@value":"半導体製造装置用語辞典"},{"@value":"ハンドウタイ セイゾウ ソウチ ヨウゴ ジテン","@language":"ja-hrkt"}],"dc:creator":"日本半導体製造装置協会編","dc:publisher":[{"@value":"日刊工業新聞社"}],"dcterms:extent":"xvi, 547p","cinii:size":"22cm","dc:language":"jpn","dc:date":"1997","cinii:ncid":"BA33584002","prism:edition":"第4版","cinii:ownerCount":"31","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA02628777#entity","@type":"foaf:Person","foaf:name":[{"@value":"日本半導体製造装置協会"},{"@value":"ニホン ハンドウタイ セイゾウ ソウチ キョウカイ","@language":"ja-hrkt"}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA001109","@type":"foaf:Organization","foaf:name":"北海道大学 大学院工学研究科・工学部図書室","rdfs:seeAlso":{"@id":"https://opac.lib.hokudai.ac.jp/opac/opac_openurl/?ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA001696","@type":"foaf:Organization","foaf:name":"宇都宮大学 附属図書館 陽東分館","rdfs:seeAlso":{"@id":"https://opac.lib.utsunomiya-u.ac.jp/opac/search?s_ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA001914","@type":"foaf:Organization","foaf:name":"東京農工大学 小金井図書館","rdfs:seeAlso":{"@id":"https://libwebservice.biblio.tuat.ac.jp/opac/opac_openurl/?ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA000117","@type":"foaf:Organization","foaf:name":"東京科学大学 すずかけ台図書館","rdfs:seeAlso":{"@id":"https://topics.libra.titech.ac.jp/recordID/catalog.bib/BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA002236","@type":"foaf:Organization","foaf:name":"福井大学 附属図書館","rdfs:seeAlso":{"@id":"https://karin.flib.u-fukui.ac.jp/opac/search?target=local&searchmode=complex&autoDetail=true&s_ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA002349","@type":"foaf:Organization","foaf:name":"岐阜大学 図書館","rdfs:seeAlso":{"@id":"https://opac.lib.gifu-u.ac.jp/opc/recordID/catalog.bib/BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA003104","@type":"foaf:Organization","foaf:name":"和歌山大学 教育機構学術情報センター 図書館","rdfs:seeAlso":{"@id":"https://opac.center.wakayama-u.ac.jp/opac/opac_openurl/?ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA003148","@type":"foaf:Organization","foaf:name":"島根大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.lib.shimane-u.ac.jp/opac/opac_link/ncid/BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA012284","@type":"foaf:Organization","foaf:name":"広島大学 図書館 中央図書館","rdfs:seeAlso":{"@id":"https://opac.lib.hiroshima-u.ac.jp/iwjs0027opc/cattab.do?sp_srh_flg=true&tab_num=0&ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA003308","@type":"foaf:Organization","foaf:name":"山口大学 図書館 工学部図書館","rdfs:seeAlso":{"@id":"https://opac.lib.yamaguchi-u.ac.jp/opac/opac_openurl/?ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA003283","@type":"foaf:Organization","foaf:name":"山口大学 図書館 総合図書館","rdfs:seeAlso":{"@id":"https://opac.lib.yamaguchi-u.ac.jp/opac/opac_openurl/?ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA019523","@type":"foaf:Organization","foaf:name":"香川大学 図書館 創造工学部分館","rdfs:seeAlso":{"@id":"https://opac.lib.kagawa-u.ac.jp/opac/search?target=local&searchmode=complex&autoDetail=true&s_ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA02289X","@type":"foaf:Organization","foaf:name":"九州大学 理系図書館","rdfs:seeAlso":{"@id":"https://catalog.lib.kyushu-u.ac.jp/opac_openurl/?ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA003487","@type":"foaf:Organization","foaf:name":"九州工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://www.lib.kyutech.ac.jp/opac/search?s_ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA004490","@type":"foaf:Organization","foaf:name":"東北工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.tohtech.ac.jp/opac/search?target=local&searchmode=complex&autoDetail=true&s_ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA006678","@type":"foaf:Organization","foaf:name":"明治大学 図書館","rdfs:seeAlso":{"@id":"https://opac2018.lib.meiji.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA006838","@type":"foaf:Organization","foaf:name":"神奈川工科大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.std.cloud.iliswave.jp/iwjs0013opc/ufirdi.do?ufi_target=ctlsrh&ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA006849","@type":"foaf:Organization","foaf:name":"神奈川大学 図書館","rdfs:seeAlso":{"@id":"http://opac.kanagawa-u.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA007670","@type":"foaf:Organization","foaf:name":"同志社大学 図書館","rdfs:seeAlso":{"@id":"https://doors.doshisha.ac.jp/opac/opac_openurl/?ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA012455","@type":"foaf:Organization","foaf:name":"龍谷大学 瀬田図書館","rdfs:seeAlso":{"@id":"https://opac.ryukoku.ac.jp/iwjs0005opc/ufirdi.do?ufi_target=ctlsrh&ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA007852","@type":"foaf:Organization","foaf:name":"大阪産業大学 綜合図書館","rdfs:seeAlso":{"@id":"https://library.cnt.osaka-sandai.ac.jp/gate?module=search&path=search&method=search&searchForm.library=true&searchForm.orderNumber=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA008221","@type":"foaf:Organization","foaf:name":"関西学院大学 図書館","rdfs:seeAlso":{"@id":"https://opac.kwansei.ac.jp/iwjs0001opc/cattab.do?sp_srh_flg=true&tab_num=0&locale=ja&ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA008243","@type":"foaf:Organization","foaf:name":"甲南大学 図書館","rdfs:seeAlso":{"@id":"https://library.konan-u.ac.jp/gate?module=search&path=search&method=search&searchForm.library=true&searchForm.orderNumber=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA008516","@type":"foaf:Organization","foaf:name":"岡山理科大学 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA009042","@type":"foaf:Organization","foaf:name":"熊本学園大学 図書館","rdfs:seeAlso":{"@id":"https://lib-opac.kumagaku.ac.jp/mylimedio/search/search.do?target=local&mode=comp&ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA009326","@type":"foaf:Organization","foaf:name":"防衛省防衛大学校 総合情報図書館"},{"@id":"https://ci.nii.ac.jp/library/FA012568","@type":"foaf:Organization","foaf:name":"医療創生大学 図書館","rdfs:seeAlso":{"@id":"https://carinweb.isu.ac.jp/CARIN/CARINOPACLINK.HTM?OAL=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA013946","@type":"foaf:Organization","foaf:name":"職業能力開発総合大学校 図書館"},{"@id":"https://ci.nii.ac.jp/library/FA014461","@type":"foaf:Organization","foaf:name":"長岡工業高等専門学校 図書館","rdfs:seeAlso":{"@id":"https://libopac-c.kosen-k.go.jp/webopac17/ctlsrh.do?ncid=BA33584002"}},{"@id":"https://ci.nii.ac.jp/library/FA016886","@type":"foaf:Organization","foaf:name":"広島商船高等専門学校 図書館","rdfs:seeAlso":{"@id":"https://libopac-c.kosen-k.go.jp/webopac35/cattab.do"}},{"@id":"https://ci.nii.ac.jp/library/FA016922","@type":"foaf:Organization","foaf:name":"高知工科大学 附属情報図書館","rdfs:seeAlso":{"@id":"https://www-opac.lib.kppuc.ac.jp/mylimedio/search/search.do?target=local&mode=comp&category-mgz=1&category-book=1&annex=all&ncid=BA33584002"}}],"dcterms:hasFormat":[{"@id":"https://dl.ndl.go.jp/pid/14225306","dc:date":"1997"}],"prism:publicationDate":["1997.11"],"dc:subject":["NDC8:549.8","NDC9:549.8"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=%E5%8D%8A%E5%B0%8E%E4%BD%93+--+%E8%BE%9E%E5%85%B8","dc:title":"半導体 -- 辞典"}],"dcterms:hasPart":[{"@id":"urn:isbn:4526040908"}]}]}