Gate dielectrics and MOS ULSIs : principles, technologies, and applications

Author(s)

    • Hori, Takashi

Bibliographic Information

Gate dielectrics and MOS ULSIs : principles, technologies, and applications

Takashi Hori

(Springer series in electronics and photonics, v. 34)

Springer, c1997

  • : alk. paper

Available at  / 13 libraries

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Includes bibliographical references (p. 325-341) and index

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