Semiconductor technology : processing and novel fabrication techniques

Author(s)

• Levinshteĭn, M. E. (Mikhail Efimovich)
• Shur, Michael

Bibliographic Information

Semiconductor technology : processing and novel fabrication techniques

edited by Mikhail Levinshtein, Michael S. Shur

Wiley, c1997

Note

"A Wiley-Interscience publication."

Includes bibliographical references and index

Details

• NCID: BA33994977
• ISBN:
  • 0471127922
• LCCN: 97001734
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xviii, 240 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors
  • LCSH : Semiconductor doping
  • LCSH : Semiconductors -- Defects