Semiconductor technology : processing and novel fabrication techniques

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書誌事項

Semiconductor technology : processing and novel fabrication techniques

edited by Mikhail Levinshtein, Michael S. Shur

Wiley, c1997

大学図書館所蔵 件 / 全7件

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注記

"A Wiley-Interscience publication."

Includes bibliographical references and index

内容説明・目次

内容説明

The product of decades of Russian research in semiconductor technology, this invaluable book offers Western researchers and engineers a wide range of new techniques, recipes, and characterization methods that provide simpler, cheaper, and more effective solutions to problems in semiconductor processing and fabrication. Many of these approaches appear here for the first time in Western technological literature.

目次

  • Introduction to Semiconductor Technology (E. Guk & N. Shmidt).
  • Transmutation Doping of Semiconductors by Charged Particles (V. Kozlovskii & L. Zakharenkov).
  • Polymer Diffusants in Semiconductor Technology (E. Guk, et al.).
  • Rare--Earth Elements in the Technology of III--V Compounds (L. Zakharenkov, et al.).
  • Intrinsic Point Defect Engineering in Silicon High--Voltage Power Device Technology (N. Sobolev).
  • Isovalent Impurity Doping of Direct--Gap III--V Semiconductor Layers (V. Chaldyshev & S. Novikov).
  • Surface Passivation of III--V Compounds by Inorganic Dielectrics and Polyimides (A. Gorelenok, et al.).
  • Precision Profiling of Semiconductor Surfaces by Photochemical Etching (D. Goryachev, et al.).
  • Index.

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