Silicon carbide : a review of fundamental questions and applications to current device technology

著者

書誌事項

Silicon carbide : a review of fundamental questions and applications to current device technology

edited by Wolfgang J. Choyke, Hiroyuki Matsunami, Gerhard Pensl

Akademie, c1997

1st ed

  • : set
  • v. 1
  • v. 2

タイトル別名

Physica status solidi

大学図書館所蔵 件 / 全7件

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注記

Vol. 1. Reprinted from a special issue of the journal, Physica Status Solidi (b)-basic research

Vol. 2. Reprinted from a special issue of the journal, Physica Status Solidi (a)-applied research

内容説明・目次

内容説明

This collection of papers gives a review of a rapidly developing subject: the theoretical discussion, the characterization, and the application of silicon carbide as a promising material in semiconductor technology.

目次

  • Theory
  • crystal growth
  • characterization of defects
  • processing
  • devices.

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