Silicon carbide : a review of fundamental questions and applications to current device technology
著者
書誌事項
Silicon carbide : a review of fundamental questions and applications to current device technology
Akademie, c1997
1st ed
- : set
- v. 1
- v. 2
- タイトル別名
-
Physica status solidi
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注記
Vol. 1. Reprinted from a special issue of the journal, Physica Status Solidi (b)-basic research
Vol. 2. Reprinted from a special issue of the journal, Physica Status Solidi (a)-applied research
内容説明・目次
内容説明
This collection of papers gives a review of a rapidly developing subject: the theoretical discussion, the characterization, and the application of silicon carbide as a promising material in semiconductor technology.
目次
- Theory
- crystal growth
- characterization of defects
- processing
- devices.
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