Radio frequency power in plasmas : 12th Topical Conference : Savannah, GA April 1997

Author(s)

• Ryan, Philip M
• Intrator, Thomas
• American Institute of Physics
• Topical Conference on Radio Frequency Power in Plasmas

Bibliographic Information

Radio frequency power in plasmas : 12th Topical Conference : Savannah, GA April 1997

editors, Philip M. Ryan, Thomas Intrator

（AIP conference proceedings, no. 403）

American Institute of Physics, 1997

Note

DOE CONF-9704102

Details

• NCID: BA34419974
• ISBN:
  • 156396709X
• LCCN: 97074472
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Woodbury, N.Y
• Pages/Volumes: xiii, 496 p.
• Size: 25 cm
• Classification:
  • DC21 : 530.44
• Subject Headings:
  • LCSH : Radio frequency
  • LCSH : Plasma (Ionized gases)
• Parent Bibliography ID:
  • BA00284604