Thin film technology handbook
Author(s)
Bibliographic Information
Thin film technology handbook
（Electronic packaging and interconnection series）
McGraw-Hill, c1998
- : hardcover
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Note
Includes bibliographical referencs and index
Description and Table of Contents
Description
The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in Multichip Modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use. It provides and develops design guidelines to realize multilayer structures in microcircuits, thus addressing a critical and rapidly growing area.
Table of Contents
Contributors.Preface.Film Deposition Techniques and Processes.Pattern Generation Techniques.Properties of Thin film Materials.Principles and Properties of Semiconductor Thin Films.Design Guidelines for Thin film Components and Construction of Thin Film Modules.Characterization of Semiconductor Thin Films: A Compendium of Techniques.Diamond Films.Thin Film Optical Materials.Thin Film Packaging and Interconnect.Thin Film for Microwave Hybrids.Yield, Testing, and Reliability.
by "Nielsen BookData"