Thin film technology handbook
著者
書誌事項
Thin film technology handbook
（Electronic packaging and interconnection series）
McGraw-Hill, c1998
- : hardcover
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注記
Includes bibliographical referencs and index
内容説明・目次
内容説明
The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in Multichip Modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use. It provides and develops design guidelines to realize multilayer structures in microcircuits, thus addressing a critical and rapidly growing area.
目次
Contributors.Preface.Film Deposition Techniques and Processes.Pattern Generation Techniques.Properties of Thin film Materials.Principles and Properties of Semiconductor Thin Films.Design Guidelines for Thin film Components and Construction of Thin Film Modules.Characterization of Semiconductor Thin Films: A Compendium of Techniques.Diamond Films.Thin Film Optical Materials.Thin Film Packaging and Interconnect.Thin Film for Microwave Hybrids.Yield, Testing, and Reliability.
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