Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

Author(s)

• Diaz de la Rubia, Tomas

Bibliographic Information

Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

editors, Tomas Diaz de la Rubia ... [et al.]

（Materials Research Society symposium proceedings, v. 469）

Materials Research Society, c1997

Note

Includes bibliographical references and index

Details

• NCID: BA34715106
• ISBN:
  • 1558993738
• LCCN: 97036151
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburg, Pa.
• Pages/Volumes: xv, 541 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Defects -- Congresses
  • LCSH : Semiconductor doping -- Congresses
  • LCSH : Silicon crystals -- Defects -- Congresses
• Parent Bibliography ID:
  • BA00013775