Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

著者

• Diaz de la Rubia, Tomas

書誌事項

Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

editors, Tomas Diaz de la Rubia ... [et al.]

（Materials Research Society symposium proceedings, v. 469）

Materials Research Society, c1997

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA34715106
• ISBN:
  • 1558993738
• LCCN: 97036151
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburg, Pa.
• ページ数/冊数: xv, 541 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Defects -- Congresses
  • LCSH : Semiconductor doping -- Congresses
  • LCSH : Silicon crystals -- Defects -- Congresses
• 親書誌ID:
  • BA00013775