Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials

著者

• Symposium on Laser and Electron Beam Processing of Electronic Materials (1979 : Los Angeles, Calif.)
• Anderson, C. Lawrence
• Celler, George K.
• Rozgonyi, George A.
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials

edited by C. Lawrence Anderson, George K. Celler, George A. Rozgony ; assistant editors, M. von Allmen ... [et al.]

（Proceedings / [Electrochemical Society], v. 80-1）

Electrochemical Society, c1980

注記

Sponsored by the Electronics Division of the Electrochemical Society

Includes bibliographical references and index

• NII書誌ID(NCID): BA34760596
• LCCN: 80065109
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Princeton, N.J.
• ページ数/冊数: x, 550 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.85
  • DC : 621.3815/2
• 件名:
  • LCSH : Semiconductor industry -- Congresses
  • LCSH : Semiconductors -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Electron beams -- Industrial applications -- Congresses
• 親書誌ID:
  • BA01323290