Microelectronic Device Technology : 1-2 October 1997, Austin, Texas

著者

• Rodder, Mark.
• Tsuchiya Toshiaki
• Burnett, David
• Wristers, Dirk
• SPIE--the International Society for Optical Engineering

書誌事項

Microelectronic Device Technology : 1-2 October 1997, Austin, Texas

Mark Rodder, Toshiaki Tsuchiya, David Burnett, Dirk Wristers chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3212）

SPIE, c1994

注記

Includes author index

詳細情報

• NII書誌ID(NCID): BA35637711
• ISBN:
  • 081942644X
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 398 p.
• 大きさ: 28 cm.
• 親書誌ID:
  • BA0022700X