Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

著者

• Riley Terrence J.

書誌事項

Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

editors, Terrence J. Riley ... [et al.]

（Materials Research Society symposium proceedings, v. 470）

Materials Research Society, c1997

注記

Includes bibliographical references and indexes

• NII書誌ID(NCID): BA3573538X
• ISBN:
  • 1558993746
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, PA
• ページ数/冊数: ix, 434 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Heat treatment -- Congresses
  • LCSH : Semiconductor doping -- Congresses
  • LCSH : Chemical vapor deposition -- Congresses
  • LCSH : Dielectrics -- Congresses
• 親書誌ID:
  • BA00013775