Advanced lithography

Author(s)

• Institute of Physics. Electronics Group

Bibliographic Information

Advanced lithography

（IOP short meetings series）

IOP Pub., c1988

Note

***遡及データをもとにした流用入力である

Details

• NCID: BA36495747
• ISBN:
  • 0854985093
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bristol
• Pages/Volumes: 92 p.
• Size: 30 cm
• Classification:
  • DC19 : 621.381/73
• Subject Headings:
  • PRECIS : Electronic equipment. Integrated circuits. Lithography
• Parent Bibliography ID:
  • BA00320912