Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988

著者

• International Conference on Ion Implantation Technology (7th : 1988 : Kyoto, Japan)
• Takagi, T.

書誌事項

Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988

edited under the responsibility of T. Takagi ... [et al.]

（Nuclear instruments & methods in physics research, Section B. Beam interactions with materials and atoms ; v.37-38）

North-Holland, 1989

タイトル別名

Ion implantation technology 7

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA36830910
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Amsterdam
• ページ数/冊数: xx, 994 p.
• 大きさ: 27 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Congresses
  • LCSH : Ion implantation -- Congresses
  • LCSH : Semiconductor doping -- Congresses
• 親書誌ID:
  • BA06785963