Tribology issues and opportunities in MEMS : proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, USA, 9-11 November 1997
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Tribology issues and opportunities in MEMS : proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, USA, 9-11 November 1997
Kluwer Academic, 1998
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Includes index