Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

Author(s)

• Stover, John C.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

John C. Stover, chair/editor

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3275）

Sponsored and published by SPIE-The International Society for Optical Engineering, c1998

Other Title

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 1998 San Jose

Note

Includes bibliographical references and index

Details

• NCID: BA37669537
• ISBN:
  • 0819427144
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 186 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductor wafers -- Measurement -- Congresses
  • LCSH : Surface roughness -- Measurement -- Congresses
  • LCSH : Flatness measurement -- Congresses
• Parent Bibliography ID:
  • BA0022700X