Diffusion in silicon : 10 years of research

著者

• Fisher, D. J.

書誌事項

Diffusion in silicon : 10 years of research

ed. by D. J. Fisher

（Diffusion and defect data : solid state data, pt. A . Defect and diffusion forum ; v. 153-155）

Scitec Publications, c1998

内容説明・目次

内容説明

This volume presents a thorough treatment of the subject, covering a full decade of progress in the understanding of Diffusion in Silicon.

目次

Pressure and Stress Effects on Diffusion in Si Boron Diffusion in Pre-Amorphised Silicon: Interactions with the End of Range Defects Stress in Silicon Nitride Films and Its Effect on Boron Diffusion in Silicon Quantum Effects on Hydrogen Diffusion in Silicon Self-Diffusion in Silicon Diffusion of Si Adsorbates on an Si(001) Surface Vacancies and Vacancy Defects in Si Observed by Positron Annihilation Vacancy Distributions in Silicon and Methods for Their Accurate Determination Interaction and Migration Properties of Ion Beam Induced Point Defects in Crystalline Silicon: Basic Research and Technological Relevance Review of Growth Striations in CZ and MCZ Silicon Wafers Theory of Reaction-Diffusion Processes at Very High Dopant Concentrations Diffusion and Reaction Kinetics of Fast-Ion-Induced Point Defects Studied by Deep Level Transient Spectroscopy Analytical Expressions for the Length of Stacking Faults during Thermal Nitridation of Oxidized Silicon and Silicon

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA37756540
• ISBN:
  • 3908450292
• 出版国コード: sz
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Zuerich
• ページ数/冊数: iv, 555 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA07841800